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In0.16Ga0.84N Metal-Semiconductor-Metal Visible-light Photodiodes with GaN Interlayers deposited by Pulsed NH3

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Abstract

GaN interlayers deposited with pulsed NH3 flow were inserted into the In0.16Ga0.84N active layer to suppress phase separation. The then fabricated metal-semiconductor-metal visible-light photodiode exhibit the significantly decreased dark current and sharpened response cutoff.

© 2017 Optical Society of America

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