Nanoscale 3D Shape Process Monitoring Using TSOM

Ravi Kiran Attota

doi:10.1364/AIO.2018.AW3A.1

Imaging and Applied Optics 2018 (3D, AO, AIO, COSI, DH, IS, LACSEA, LS&C, MATH, pcAOP)
OSA Technical Digest (Optica Publishing Group, 2018),
paper AW3A.1
•https://doi.org/10.1364/AIO.2018.AW3A.1

Nanoscale 3D Shape Process Monitoring Using TSOM

Ravi Kiran Attota

Applied Industrial Optics: Spectroscopy, Imaging and Metrology 2018

Orlando, Florida United States
25–28 June 2018
ISBN: 978-1-943580-44-6

From the session
Animal Optics: The Facts of Light (AW3A)

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R. K. Attota, "Nanoscale 3D Shape Process Monitoring Using TSOM," in Imaging and Applied Optics 2018 (3D, AO, AIO, COSI, DH, IS, LACSEA, LS&C, MATH, pcAOP), OSA Technical Digest (Optica Publishing Group, 2018), paper AW3A.1.

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Abstract

Through-focus scanning optical microscopy (TSOM) is sensitive to three-dimensional shape changes of nanoscale to microscale targets. Here we demonstrate process monitoring method of 3D targets using TSOM down to sub-nanometer.

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