We report on a confocal thermoreflectance imaging system, which provides the elimination of out-of-focus reflections, and demonstrate the improvement of ~23 times in the sensitivity due to the confocality during the sub-surface thermoreflectance measurement.

© 2018 The Author(s)

PDF Article


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access OSA Member Subscription