Muller matrix ellipsometry is introduced as a nondestructive method to measure the fabrication process of grating upon holography, with which the exact widths and refractive indices, nanoparticle fractions of bright and dark regions are achieved.
© 2018 The Author(s)
This paper was not presented at the conference
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
Login to access OSA Member Subscription