Abstract

A closed-loop XeCI laser (Mistral) operating at 100-mJ/pulse and repetition rates up to 1500 pps is being used to develop long lifetime high-power rare-gas-halide excimer laser technology. The laser system is equipped with acoustic dampers, window purge flow, a gas reprocessing loop, a tube fin/heat exchanger, a centrifugal blower, and a long life pulse modulator.

© 1982 Optical Society of America

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