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Precise measuring method for aspheric surfaces using a laser heterodyne interferometer

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Abstract

Recently the demand for aspherical lenses or mirrors has been increasing in the field of optical design and manufacturing. But difficulty in manufacturing and testing keeps them from being used widely. A variety of measuring methods have been proposed in the past. There are two general approaches: inter ferometric methods and X-Y-Z coordinate measuring methods. The former methods are very complicated but provide good resolution (~λ/4). The latter ones have difficulty reaching this level of accuracy. The value of thickness Z is determined by some functions of X-Y in aspheric surfaces. Thus it is desirable to mea- sure the value of Z in an arbitrary X-Y coordinate to a resolution of <λ/4.

© 1983 Optical Society of America

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