Abstract

The KrCI laser has been neglected as a source of intense UV radiation due to the low achievable energies. To the best of our knowledge, the highest reported energy¹ is 160 mJ (1 J/liter). Commercial excimer lasers, claiming up to 1 J of output energy from KrF, give at best 60 mJ from KrCl. In this paper we demonstrate that to obtain laser energies at 222 nm comparable with those achieved from KrF and XeCl, It is necessary to supply to the KrCl laser medium very high specific electrical power (20 MW/cc) to compensate for the high transient optical losses.

© 1983 Optical Society of America