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KrF Laser Extraction Measurements for High Kr Concentration Gas Mixtures

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Abstract

The effect on laser output efficiency of varying the krypton (Kr) concentration in an e-beam pumped KrF laser (with Ar diluent) was measured. The principle reason for studying this effect is to explore the possibility of laser operation at reduced static pressures, in particular at 600 Torr (local Los Alamos pressure), without seriously degrading the laser efficiency. In fact, enhanced performance is expected based on predictions with the LANL KrF kinetics code(1) however, the practical benefit would be to reduce the pressure loading on the output window of the 1 m square aperture of the large aperture module (LAM) at Los Alamos. This also allows for serious consideration of devices that do not require a quartz output window, since the elimination of the pressure differential has been shown to allow the possibility of using mechanical shutters.(2-3)

© 1984 Optical Society of America

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