Abstract

Gold microcircuit patterns have been generated by excimer laser photolysis of a volatile gold complex. Linewidths as fine as 2 μm were readily obtained utilizing a simple optical projection system comprised of a 4× reduction lens, a lithographic photomask, and UV output from an excimer laser. This single-step all-dry process enabled us to produce Au films of variable thicknesses (up to 0.3 μm) by varying the total laser energy dose.

© 1985 Optical Society of America