Abstract
Laser photochemical or thermochemical deposition of metallic films on transparent substrates such as glass or quartz has proven commercially useful and scientifically interesting. The transparent substrate facilitates the use of powerful optical techniques to probe fundamental deposition parameters while a major commercial application is the repair of clear defects in photomasks. The lasers chosen for such studies have typically been either ultraviolet (usually frequency-doubled argon) or infrared (CO2). UV lasers offer high resolution but necessitate the use of costly and often difficult to obtain quartz or reflective optics, IR lasers offer limited resolution and also require specialized optics.
© 1985 Optical Society of America
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