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KrF Intrinsic laser efficiency as a function of Kr concentration

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Abstract

A series of measurements will be reported in which the intrinsic energy efficiency of the KrF* laser was studied as a function of Kr concentration. A Marx Bank-driven 1-m e-gun device1 was used to produce a 600-nsec 11.4-A/cm2 excitation pulse In the laser cavity. The fluorine density used (0.3 % < [F2] < 0.4%) was chosen to keep the fuel burnup to <50% during the laser pulse. The Kr density was varied between 4 and 99.6% with the balance made up by Ar.

© 1985 Optical Society of America

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