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Tandem Discharg-Pumped Excimer Laser

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Abstract

In scaling discharge-pumped excimer lasers to multi-joule output energies, it is necessary to employ some form of switch between the pulse forming line and the discharge electrodes. As a result of the stressing requirements of peak current and risetime, this switch can seriously impact the system lifetime, reliability and efficiency, We report here a novel concept for discharge pumping which eliminates the need for an output switch and the associated support equipment.

© 1985 Optical Society of America

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