Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Angstrom resolution optical profilometry for microscopic objects

Not Accessible

Your library or personal account may give you access

Abstract

Different microscopes for profilometry have been proposed.1·2 Those Instruments either require custom-built microscopes or extensive modifications of commercially available instruments. The instrument we present uses a regular microscope with regular interference contrast optics and achieves angstrom height resolution with a modified illumination/detection scheme, still keeping the normal lateral resolution of a microscope.

© 1986 Optical Society of America

PDF Article
More Like This
From angstroms to microns: Extending the measurement range of optical profilers

Katherine Creath and James C. Wyant
ThB6 Optical Fabrication and Testing (OF&T) 1986

Differential amplitude scanning optical microscope

M. Vaez Iravani and C. W. See
ME4 OSA Annual Meeting (FIO) 1986

Surface Profiling With Optical and Mechanical Instruments

Jean M. Bennett, Thomas C. Bristow, Kevork Arackellian, and James C. Wyant
ThB4 Optical Fabrication and Testing (OF&T) 1986

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved