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Self-interference correction for a laser measurement system

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Abstract

Nonlinear phase measurement error affects and limits the accuracy of ac laser interferometers.1 This self-interference error has two primary origins: leakage of incorrect polarizations into different arms of the interferometer through imperfect separation of the polarized components and introduction of elliptical components through misalignment- Foe many metrological applications it is desirable to reduce or cancel the phase error caused by the self-interference. This is especially applicable to systems which have a few degrees of freedom in alignment, measure stow linear distance changes, or are inaccessible to realignment over operational lifetime.

© 1986 Optical Society of America

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