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Operation of a modular long-gain-length inductively stabilized excimer laser

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Abstract

Previously, a double-headed inductively stabilized device named the V-8 laser (two separate discharges with gas flow connected in series) was operated and shown to have improved characteristics regarding pulse repetition rate per unit gas flow compared with more conventional avalanche discharge devices. With this device we showed near kilohertz operation for long times with very minimal gas flow.1 A new inductively stabilized device named the Stablex laser incorporates a modular design that allows length scaling in multiples of a fundamental unit of length to provide flexibility in tailoring the laser to specific applications. Initial discharge area is 1 × 1 cm2 with the final configuration calling for a 2-cm gap spacing. Low-puise-repetition-rate tests on a four-module device show XeCI output energies at 175 mJ promising ultimate performance at the 400-W level at 1-kHz prf.

© 1986 Optical Society of America

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