Influence on temporal and spatial intensity distribution on materials processing by excimer lasers

R. POPRAWE; M. WEHNER; W. SCHULZE

Conference on Lasers and Electro-Optics
OSA Technical Digest (Optica Publishing Group, 1988),
paper THE2

Influence on temporal and spatial intensity distribution on materials processing by excimer lasers

R. POPRAWE, M. WEHNER, and W. SCHULZE

Conference on Lasers and Electro-Optics 1988

Anaheim, California United States
25–29 April 1988
ISBN: 1-55752-033-X

From the session
Laser Ablative Interactions for Microelectronics (THE)

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R. POPRAWE, M. WEHNER, and W. SCHULZE, "Influence on temporal and spatial intensity distribution on materials processing by excimer lasers," in Conference on Lasers and Electro-Optics, D. Pinnow and P. Moulton, eds., Vol. 7 of OSA Technical Digest (Optica Publishing Group, 1988), paper THE2.

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Abstract

Presently available commercial excimer laser systems show variation of the beam power in time and space across the beam diameter. Depending on the position in the beam cross section with respect to the optical axis variations of local pulse energy (J/cm²), local pulse power (W/cm²), local pulse length (ns), and pulse shape have been recorded.

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