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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1988),
  • paper THE4

Laser processing: novel techniques for integrated circuit fabrication and repair

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Abstract

Laser processing offers a synergistic array of new fabrication technologies addressing the potential needs of the competitive cost-effective low-volume silicon factory of the future. We report our progress related to doping, deposition, and etching, the fundamental keys to full IC processing.

© 1988 Optical Society of America

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