Abstract

Optical integrated circuits (OICs) generally consist of several waveguide components of different structures, e.g., gratings¹ of submicron period and single-mode channel waveguides of micron width. Large numbers of such components must be integrated on one chip to implement a higher device function. For these special patternings, we have developed electron-beam (EB) and laser-beam (LB) writing systems. By using these systems, we have successfully fabricated an integrated-optic disk pickup device and an integrated-optic fiber laser Doppler velocimeter.

© 1988 Optical Society of America