Formation and Development of Surface Structures of Metals by Excimer Laser Irradiation

W. SCHULZE; R. POPRAWE; M. WEHNER

Conference on Lasers and Electro-Optics
OSA Technical Digest (Optica Publishing Group, 1989),
paper CPD23

Formation and Development of Surface Structures of Metals by Excimer Laser Irradiation

W. SCHULZE, R. POPRAWE, and M. WEHNER

Conference on Lasers and Electro-Optics 1989

Baltimore, Maryland United States
24–28 April 1989
ISBN: 1-55752-086-0

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W. SCHULZE, R. POPRAWE, and M. WEHNER, "Formation and Development of Surface Structures of Metals by Excimer Laser Irradiation," in Conference on Lasers and Electro-Optics, R. Bartolini, P. Liao, J. Bufton, and W. Krupke, eds., Vol. 11 of OSA Technical Digest (Optica Publishing Group, 1989), paper CPD23.

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Abstract

Commercially available excimer laser systems have characteristica such as large rectangular beam shape, short pulses and small penetration depth for the majority of materials, a fact which predestinates them for applications in surface technology.

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