Abstract
Following the photoablation of copper metal targets with wavelengths of 193, 248, and 351 nm, laser-induced fluorescence (LIF) and Langmuir probe measurements have been made in the etch plume. The combination of these two techniques gives a relatively complete view of atom and ion behavior. First, Langmuir probe data give results for overall ion energy and density and electron temperature on a microsecond time scale.
© 1989 Optical Society of America
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