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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1990),
  • paper CFA5

Fully monolithic self-aligned GaAs/AlGaAs single quantum well ridge lasers

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Abstract

Recently, a dry-etching process for the fabrication of monolithic broad area lasers has been demonstrated to achieve facets with a quality similar to cleaved ones.1 With this process as the basis, a fully monolithic self-aligned ridge laser process has been developed for AlGaAs/GaAs graded index separate confinement heterostructure single quantum well (GRINSCH-SQW) structures.

© 1990 Optical Society of America

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