Abstract

Metal-polymer interfaces are of central importance in microelectronic applications. Yet formation and deterioration of such interfaces are still not well understood because of the lack of appropriate analytical tools. We report here we believe the first use of optical second harmonic generation (SHG) to probe the deposition of a metal film on polyimide and study diffusion of metal atoms into polyimide and diffusion of oxygen and nitrogen across the metal film.

© 1990 Optical Society of America