Abstract
Copper vapor lasers with high average power (up to 100 W) at high pulse repetition rates (~10 kHz) are now widely available commercially. Second harmonic and sum frequency generation (SHG and SFG) of the CVL green (510.6-nm) and yellow (578.2-nm) outputs represents an attractive approach to UV source development for applications such as photolithography. However, nonlinear conversion efficiencies have been disappointing due to the poor beam quality from the CVL.
© 1990 Optical Society of America
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