Abstract
Polyimide is a class of polymer with thermal stability at temperatures as high as 400 °C, a low thermal expansion coefficient, and a high electric resistivity and already in widespread use in the semiconductor industry. To date, the primary application of polyimides in the industry is as a dielectric insulator for semiconductor chips. Recently the need for higher-speed interchip communications, made possible by optical interconnects, has led to the application of polyimides as an integrated passive optical waveguide material.
© 1991 Optical Society of America
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