Abstract

Materials which are transparent to the excimer laser radiation are usually extremely difficult to ablate cleanly. High fluence are needed and ablation is more a damage due to electrical breakdown in the solid. However, coherent multiphoton absorption of a femtosecond pulse and subsequent clean ablation of regular TEFLON was demonstrated.¹ Doping of some polymer in order to make it absorbing and sensitive to ablation has been reported in the past few years.²

© 1991 Optical Society of America