Abstract
Laser machining of ferrite ceramics was previously done1–3 with the purpose of fabricating magnetic devices using a focussed continuous laser beam to scan the sample placed in a gas (e.g., CC14) or liquid chemical (e.g., KOH solution). Such a spot-scanning approach has several drawbacks: (1) a “serial processing” technique, the through-put for large-area processing is slow; (2) the etching depth is hard to control since the focussed laser spot can remove many microns of materials during its pulse duration or dwell time on a spot; (3) for high-resolution patterning, the quality of the border and side-wall is hard to control because of the “scalloping” effect of the focussed laser spot; (4) the use of chemicals is at least inconvenient if not damaging to delicate components.
© 1991 Optical Society of America
PDF ArticleMore Like This
G. H. Pettit, M. N. Ediger, and R. P. Weiblinger
MMM5 OSA Annual Meeting (FIO) 1991
M. N. Ediger and G. H. Pettit
CTuC2 Conference on Lasers and Electro-Optics (CLEO:S&I) 1991
Hiroyuki Niino and Akira Yabe
CWF57 Conference on Lasers and Electro-Optics (CLEO:S&I) 1991