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Conferences > CLEO > 1991 > CMD > CMD7
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1991),
  • paper CMD7

Laser-quality coatings deposited by reactive low voltage ion plating

Kari H. Guenther, Marc D. Himel, K. Balasubramanian, Xue-Qun Hu, Robert Chow, and Christopher J. Stolz

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Abstract

As implemented in commercially available equipment, reactive low voltage ion plating (RLVIP) has shown1 the capability to produce very dense, glassy, thin films (Fig. 1) with extremely smooth surfaces (as low as 0.2-nm rms roughness for 0.5-μm-thick single layers). These films lack the columnar microstructure typical of electron-beam-deposited thin films.2

© 1991 Optical Society of America

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