Abstract
For a successful development of our 1-kW Eureka excimer laser with good beam quality, it is important to understand the behavior of a self-sustained discharge and to find the stability regime. For technical and economical reasons the efficiency of such a laser must be optimized. With respect to the limitation of fast-switching components at high repetition rate, we also have to optimize for fast switching with minimum energy.
© 1991 Optical Society of America
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