Wet etching of proton-exchanged lithium niobate—a novel processing technique

Fredrik Laurell; Gunnar Arvidsson; Jonas Webjörn

Conference on Lasers and Electro-Optics
OSA Technical Digest (Optica Publishing Group, 1991),
paper CThR25

Wet etching of proton-exchanged lithium niobate—a novel processing technique

Fredrik Laurell, Gunnar Arvidsson, and Jonas Webjörn

Conference on Lasers and Electro-Optics 1991

Baltimore, Maryland United States
12–17 May 1991
ISBN: 1-55752-189-1

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CLEO Poster Session (CThR)

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F. Laurell, G. Arvidsson, and J. Webjörn, "Wet etching of proton-exchanged lithium niobate—a novel processing technique," in Conference on Lasers and Electro-Optics, J. Bufton, A. Glass, T. Hsu, and W. Krupke, eds., Vol. 10 of OSA Technical Digest (Optica Publishing Group, 1991), paper CThR25.

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Abstract

It is known that in proton-exchanged wave-guides in lithium niobate,¹ the crystal structure is modified. We demonstrate that proton-exchanged regions on the c⁺-face can be etched away selectively using a mixture of HF and HNO₃. In this way it is possible to form, for example, a groove with a smooth bottom surface. The unexchanged c⁺-face of lithium niobate is only very slowly etched by this acid.

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