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  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1991),
  • paper CWM2

Dynamics of micro-scale electromechanical spatial light modulators

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Abstract

An important class of spatial light modulator (SLM) is the deformable mirror device (DMD), a monolithically integrated, silicon-based array of individually addressable micromechanical mirror elements that are controlled electronically,1 Applications of DMDs include optical switching, high-definition-television projection displays, and electro-photographic printers. We have modeled the operation of the DMD and used a fast, high-resolution, and calibratable method2 to measure its optical-beam-deflection characteristics.

© 1991 Optical Society of America

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