Abstract

Laser spectroscopy can be used to probe surface chemical processing by monitoring in real time the composition, morphology, crystallinity, temperature, and stresses of the surface modification, as well as the composition of the surrounding gas medium. The use of such methods to analyze laser-assisted chemical modifications of surfaces in situ and noninvasively is reviewed here. Work using Raman microprobe analysis to investigate laser-assisted etching with submicron resolution is emphasized. The twin goals of such diagnostics studies are to improve the mechanistic understanding of thin film processing and to develop practical techniques for real-time monitoring and control.

© 1992 Optical Society of America