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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1992),
  • paper CThO2

Submicron-period dot structures fabricated on InP and GaAs substrates by laser-induced surface electromagnetic wave etching

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Abstract

Recently, fabrication of periodic structures with periods shorter than the laser wavelengths has been demonstrated in laser annealing,1 laser chemical vapor deposition,2 and laser etching,3 These periodic structures are defined by the spatial modulation of optical intensity resulting from interference between the incident laser light and the surface electromagnetic waves (SEWs). However, since the SEWs are excited by incident laser light scattered at random by the surface roughness, the periodic structures have been ripple structures in many cases.

© 1992 Optical Society of America

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