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Since the appearance of KrF exeimer lasers for material processing and for UV microlithography, the number of lasers has been growing rapidly. With this increase, the operating cost is becoming the important issue. Although the cost of laser gas is dominant in the operating expenses, the analysis of gas lifetime is only in the first stage. A few people have recently reported improvement of the gas lifetime.1,2.
© 1992 Optical Society of America
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