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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1992),
  • paper CTuE1

Neodymium: glass zigzag slab regenerative amplifier laser system for x-ray lithography

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Abstract

We have developed a prototype Nd laser system for point source x-ray lithography for semiconductor device fabrication.

© 1992 Optical Society of America

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