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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1992),
  • paper CWJ1

Production process for fabrication of superconducting thin films by excimer laser ablation

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Abstract

Epitaxial c-axis oriented thin films of Tl2Ca1Ba2Cu2Ox (2I22) have been prepared routinely on 2-in. diameter LaAlO3 (100) substrates by a two-step process involving excimer laser ablation deposition of an amorphous film followed by high temperature oxygen annealing. To overcome the limited deposition area of the laser ablation process, a simple UHV-compatible two-axis substrate motion feedthrough was developed.

© 1992 Optical Society of America

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