Abstract
Epitaxial c-axis oriented thin films of Tl2Ca1Ba2Cu2Ox (2I22) have been prepared routinely on 2-in. diameter LaAlO3 (100) substrates by a two-step process involving excimer laser ablation deposition of an amorphous film followed by high temperature oxygen annealing. To overcome the limited deposition area of the laser ablation process, a simple UHV-compatible two-axis substrate motion feedthrough was developed.
© 1992 Optical Society of America
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