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High Speed Surface Micromachined MEMS Tunable VCSEL for Telecom Wavelengths

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Abstract

We report direct modulation of a widely tunable surface micromachined MEMS VCSEL. The MEMS is electro-thermally actuated for tuning the emission wavelength over 60 nm with a center wavelength of 1554 nm. Error-free transmission is achieved at 10 Gbit/s for 47 nm tuning range.

© 2015 Optical Society of America

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