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Conferences > CLEO_AT > 2015 > ATu1J > ATu1J.7

Advanced Laser Lift Off in the Manufacturing of LEDs

Marco Mendes, Cristian Porneala, Xiangyang Song, Mathew Hannon, Rouzbeh Sarrafi, Joshua Schoenly, Dana Sercel, Sean Dennigan, Roy VanGemert, Heath Chaplin, John Bickley, and Jeff Sercel

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Abstract

Advanced laser lift off (LLO) techniques leading to high quality and high throughput fabrication of vertical and flip chip GaN and AlN based LEDs are discussed.

© 2015 Optical Society of America

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