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Conferences > CLEO_AT > 2016 > ATu3J > ATu3J.8

Two-photon laser-assisted device alteration in CMOS integrated circuits using linearly, circularly and radially polarized light

M. Rutkauskas, C. Farrell, C. Dorrer, K. L. Marshall, T. Crawford, T. R. Lundquist, P. Vedagarbha, K. Erington, D. Bodoh, and D. T. Reid

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Abstract

We investigate the influence of the incident light polarization on the 2pLADA spatial resolution. By comparing 2pLADA results obtained using linear, circular and radial polarizations we show that certain polarizations offer advantages in particular applications.

© 2016 Optical Society of America

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