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Conferences > CLEO_AT > 2016 > ATu4J > ATu4J.5

Ptychographic Imaging with 17.5nm Spatial Resolution Employing High Harmonic Light at 13.5nm

Dennis F. Gardner, Giulia F. Mancini, Michael Tanksalvala, Elisabeth R. Shanblatt, Xiaoshi Zhang, Benjamin R. Galloway, Christina R. Porter, Robert Karl-Jr., Charles Bevis, Margaret M. Murnane, Henry Kapteyn, and Daniel E. Adams

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Abstract

We demonstrate a record near-wavelength limited 17.5nm spatial resolution for EUV imaging using ptychographic coherent diffractive imaging with illumination at 13.5nm from a high-harmonic light source.

© 2016 Optical Society of America

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