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Displacement and Attitude Angles (Tilt and Yaw) are Measured by a Single-Channel Self-Mixing Interferometer

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Abstract

We develop a self-mixing interferometer capable of measuring the position (with half-wavelength resolution) and the two attitude angles - pitch and yaw - (with 15 microrad resolution) of a machine tool turret. The three measurements are performed, for the first time to the best of our knowledge, simultaneously and using a single channel optical signal.

© 2016 Optical Society of America

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