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Thin and Transferrable Graphene Oxide Grating Layer

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Abstract

A submicron (280-nm), thin (3-nm) and transferrable graphene oxide grating layer is implemented for the first time by interference lithography, oxygen plasma etching, and PMMA-assisted transfer approach. The diffraction efficiency is measured to be only 4.98×10−7.

© 2016 Optical Society of America

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