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Metal Assisted Focused-Ion Beam Etching for High-Fidelity Fabrication of Nanophotonic Devices

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Abstract

We report an MAFIB technique that significantly improves the fidelity of nanofabrication that allows direct milling of nanostructures on various materials with fine edges and smooth surfaces. The technique supports precise fabrication of nanophotonic devices.

© 2017 Optical Society of America

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