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Conferences > CLEO_AT > 2017 > JTu5A > JTu5A.125

Ge/SiGe Quantum-well Micro-bridges with High Tensile Strain

Muyu Xue, Xiaochi Chen, Junyan Chen, Ming-Yen Kao, Colleen Shang, Kai Zang, Yijie Huo, Ching-Ying Lu, Yusi Chen, Huiyang Deng, Theodore I. Kamins, and James S. Harris

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Abstract

Highly tensile-strained Ge/SiGe MQW structures on Si substrates are formed by introducing micro-bridge structures. Lattice matching and strain of epitaxial structures are analyzed by XRD. Large strain induced by micro-bridges is confirmed with Raman spectroscopy.

© 2017 Optical Society of America

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