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Amorphous-Crystalline Micro- and Nanostructures in Silicon Fabricated Using Ultrashort Laser Pulses

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Abstract

We demonstrate an innovative way to fabricate different types of amorphous-crystalline surface structures in silicon using ultrashort laser pulses. Fluence-dependent solidification dynamics and interference of incident and scattered laser light are identified as underlying mechanisms.

© 2017 Optical Society of America

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