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Conferences > CLEO_AT > 2019 > ATu4I > ATu4I.3

Single-crystalline Te-hyperdoped silicon via controlling the velocity of ultra-fast cooling during femtosecond-laser irradiation

Zixi Jia, Qiang Wu, Ride Wang, Xiaorong Jin, Song Huang, Jianghong Yao, and Jingjun Xu

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Abstract

We implement single-crystalline tellurium (Te)-hyperdoped silicon via controlling the velocity of ultra-fast cooling during femtosecond-laser irradiation, providing a new path of less defective semiconductor hyperdoping, has great potential in applications of low noise semiconductor devices.

© 2019 The Author(s)

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