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Conferences > CLEO_Europe > 2019 > ch_5 > ch_5_3
  • 2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference
  • OSA Technical Digest (Optica Publishing Group, 2019),
  • paper ch_5_3

On-chip photocurrent displacement sensor based on a waveguide-coupled nanomechanical photonic crystal cavity

Federico Galeotti, Ivana Seršić Vollenbroek, Maurangelo Petruzzella, Francesco M. Pagliano, Frank W. M. van Otten, Žarko Zobenica, Hamed Sadeghian Marnani, Abbas Mohtashami, Rob W. van der Heijden, and Andrea Fiore

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Abstract

A nano-opto-electro-mechanical transducer for displacement sensing is presented. It consists of a double-membrane photonic crystal cavity integrated with electro-optical read-out and on-chip light-delivery. The operation is demonstrated by atomic force microscope actuation and photocurrent sensing.

© 2019 IEEE

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