Author Affiliations

Nathan J. Brooks,^1,* Kevin M. Dorney,¹ Jennifer L. Ellis,^1,2 Daniel D. Hickstein,^1,2,3 Quynh L. Nguyen,¹ Christian Gentry,¹ Carlos Hernández-García,⁴ Dmitry Zusin,¹ Justin M. Shaw,⁵ G. S. Matthijs Jansen,⁶ Stefan Witte,⁶ Henry C. Kapteyn,¹ and Margaret M. Murnane¹

¹JILA – Department of Physics, University of Colorado and NIST, Boulder, CO, USA

²Time and Frequency Division, National Institute of Standards and Technology, 325 Broadway, Boulder, Colorado 80305, USA

³Kapteyn–Murnane Laboratories Inc., Boulder, Colorado 80301, USA

⁴Grupo de Investigación en Aplicaciones del Láser y Fotónica, Departamento de Física Aplicada, Universidad de Salamanca, Salamanca, Spain

⁵Quantum Electromagnetics Division, National Institute of Standards and Technology, Boulder, CO, USA

⁶Advanced Research Center for Nanolithography (ARCNL), Science Park 110, 1098 XG Amsterdam, The Netherlands

^*Corresponding author: nathan.brooks@colorado.edu