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Electro-optic polymer surface-normal modulator using silicon high-contrast grating resonator

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Abstract

A surface-normal optical modulator using electro-optic polymer embedded inside a 570-nm-thick silicon high-contrast-grating resonator is fabricated. With a voltage applied to silicon grating, we obtain >20% intensity modulation of the transmitted light at 30 MHz.

© 2019 The Author(s)

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