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Optimization of Si-Photonics Compatible AlN waveguides for Integrated Nonlinear Optics Applications

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Abstract

We explore fabrication-process dependencies on optical losses of AlN films and demonstrate Second Harmonic Generation through modal phase-matching in integrated AlN waveguides. A loss-dependent conversion efficiency model is developed to better design waveguides in lossy AlN media.

© 2019 The Author(s)

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