CMOS-Compatible High-Q Photonic Crystal Cavities

Delphin Dodane; Jerôme Bourderionnnet; Sylvain Combrié; Alfredo De Rossi

doi:10.1364/CLEO_SI.2018.STh3A.1

Conference on Lasers and Electro-Optics
OSA Technical Digest (online) (Optica Publishing Group, 2018),
paper STh3A.1
•https://doi.org/10.1364/CLEO_SI.2018.STh3A.1

CMOS-Compatible High-Q Photonic Crystal Cavities

Delphin Dodane, Jerôme Bourderionnnet, Sylvain Combrié, and Alfredo De Rossi

CLEO: Science and Innovations 2018

San Jose, California United States
13–18 May 2018
ISBN: 978-1-943580-42-2

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Photonic Crystals (STh3A)

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D. Dodane, J. Bourderionnnet, S. Combrié, and A. De Rossi, "CMOS-Compatible High-Q Photonic Crystal Cavities," in Conference on Lasers and Electro-Optics, OSA Technical Digest (online) (Optica Publishing Group, 2018), paper STh3A.1.

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Abstract

All-Solid Cladding Photonic Crystal Cavities have been fabricated in CMOS foundry. A recent design concept resulted into a measured Q-factor of 0.6 million (4.1 × 10⁵ in average). Statistical analysis leads to an estimate of the fabrication disorder of 1.2 nm.

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